Mecanica De Materiales Johnston Beer 5ta Edicion
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Mecanica De Materiales Johnston Beer 5ta Edicion
Contacto con Ferdinand P. Beer Solucionario Mecanica De Materiales 5 Te.
Mechanics for Engineers, Statics, 5th. Mecanica Vetorial Para Engenheiros. Dinamica (Em.The present invention relates to a technology for transporting an inspected target object (transport target object) to be inspected (transported target object) using a container and inspecting the target object.
Heretofore, when transporting an inspected target object to be inspected, such as a semiconductor wafer or a reticle, a target object container including a container main body that stores an inspected target object is mounted on a transporting hand provided to a transporting apparatus, and the inspected target object is pushed out from the target object container and transported to an inspection apparatus by the transporting apparatus. In this way, the inspected target object is transported to the inspection apparatus, and the inspected target object is inspected.
In this case, in order to reduce a burden on a worker for pushing out the inspected target object from the target object container and for taking the inspected target object out of the container after the inspection in the inspection apparatus, a transporting hand that holds the container main body in a direction along which the inspected target object is transported is mounted on the transporting apparatus, and the inspected target object is pushed out from the container main body of the target object container held by the transporting hand, and transported to the inspection apparatus. The target object container is transported to the inspection apparatus together with the inspected target object, and the inspected target object is inspected.
Incidentally, in case of transporting the inspected target object (transported target object) using the container, it is possible to transport the inspected target object with respect to a plurality of container main bodies having a different shape. In this case, when the inspected target object has an inspection mark, such as a notch, the inspected target object is detected based on a mark signal indicating a presence or absence of the inspection mark, and the inspected target object is transported using the container main body, by which the inspected target object is transported, that holds the inspected target object.
However, there is a case where the mark signal indicating the presence or absence of the inspection mark is erroneously detected due to noise included in the mark signal output from the mark detecting unit, or noise included in an image of the inspected target object. In this case, the inspected target object is transported together with a container main body, by which an inspected target object is not
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